|
020 -INTERNATIONAL STANDARD BOOK NUMBER
|
|
|
|
040 -CATALOGING SOURCE
|
|
a
Original cataloging agency
NEU GrandLibrary
|
|
|
041 -LANGUAGE CODE
|
|
a
Language code of text/sound track or separate title
eng
|
|
|
050 -LIBRARY OF CONGRESS CALL NUMBER
|
|
a
Classification number
TK7871.85
|
|
b
Item number
.S9535 1999
|
|
|
082 -DEWEY DECIMAL CLASSIFICATION NUMBER
|
|
a
Dewey Classification
621.3815/2
|
|
|
111 -MAIN ENTRY--MEETING NAME
|
|
a
Meeting name or jurisdiction name as entry element
Symposium I on Rapid Thermal Processing
|
|
|
245 -TITLE STATEMENT
|
|
a
Title
Rapid thermal processing :
|
|
b
Remainder of title
proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998 /
|
|
c
Statement of responsibility, etc
edited by A. Slaoui ... [et al.].
|
|
h
Medium
BOOK
|
|
|
260 -PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
|
|
a
Place of publication, distribution, etc
Amsterdam ;
|
|
a
Place of publication, distribution, etc
Oxford :
|
|
b
Name of publisher, distributor, etc
Elsevier,
|
|
c
Date of publication, distribution, etc
1999.
|
|
|
300 -PHYSICAL DESCRIPTION
|
|
a
Extent
170-350 p. :
|
|
b
Other physical details
ill. ;
|
|
c
Dimensions
29 cm.
|
|
|
440 -SERIES STATEMENT/ADDED ENTRY--TITLE
|
|
a
Title
European Materials Research Society symposia proceedings ;
|
|
v
Volume number/sequential designation
v. 84
|
|
|
500 -GENERAL NOTE
|
|
a
General note
"Reprinted from Materials science in semiconductor processing, vol. 1/2-4"--T.p. verso.
|
|
|
504 -BIBLIOGRAPHY, ETC. NOTE
|
|
a
Bibliography, etc
Includes bibliographical references
|
|
|
650 -SUBJECT ADDED ENTRY--TOPICAL TERM
|
|
a
Topical term or geographic name as entry element
Rapid thermal processing
|
|
|
650 -SUBJECT ADDED ENTRY--TOPICAL TERM
|
|
a
Topical term or geographic name as entry element
Integrated circuits
|
|
|
650 -SUBJECT ADDED ENTRY--TOPICAL TERM
|
|
a
Topical term or geographic name as entry element
Semiconductor doping
|
|
|
700 -ADDED ENTRY--PERSONAL NAME
|
|
|
